High-frequency power supply device and output control method therefor

A high-frequency power supply device for outputting a high-frequency pulse to a target device based on a synchronous pulse and a clock pulse, comprising:

• a synchronous pulse generation mechanism that generates a synchronous pulse containing output level information and output timing information of the high-frequency pulse;
• an output level setting mechanism that generates an output level signal for setting an output level of the high-frequency pulse based on the output level information;
• and an oscillation mechanism that receives a period reference signal of the synchronous pulse and the output level signal to oscillate the high-frequency pulse, wherein
• the synchronous pulse generation mechanism comprises a synchronous pulse formation circuit that forms the synchronous pulse, a period reference signal generation unit that generates a period reference signal at a period reference time of the synchronous pulse, and a clocking mechanism that clocks an output stop time based on the period reference signal and sends an output stop signal to the output level setting mechanism,
• the output level setting mechanism comprises a level determination unit that determines an output level set in the high-frequency pulse in response to the output level signal, and a level setting signal generation unit that generates a level setting signal based on a result of the determination made by the level determination unit,
• the oscillation mechanism comprises a clock pulse generator that generates the clock pulse, and an oscillation amplifier that receives the period reference signal, the level setting signal and the clock pulse to generate the high-frequency pulse based on these signals, wherein
• the output level setting mechanism stops sending out the level setting signal while the output stop signal is being received.