Ventilated semiconductor processing apparatus

A semiconductor processing apparatus comprising:

• a main body device that inspects or processes a semiconductor;
• a control device that controls the main body device;
• and
• a transfer device that transfers the semiconductor to and from the main body device,
• the semiconductor processing apparatus further comprising a main body cover that covers the main body device and the control device, wherein
• the main body cover has a transfer opening for transferring the semiconductor to and from the transfer device,
• the transfer device has a fan filter unit configured to generate a downward air flow inside the transfer device, apply the downward air flow to the semiconductor, and send the downward airflow to the main body cover through the transfer opening,
• the main body cover further has an upper intake port that generates an air flow in a horizontal direction in an upper region inside the main body cover, and
• the main body cover further has an exhaust port that exhausts an air flow in the horizontal direction in the upper region.