Selection element with a plurality of amorphous layers
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsGabriele Navarro, Mathieu Bernard, Chiara Sabbione, Marie-Claire Cyrille, Camille Laguna
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Abstract
A selection element including, in a first portion, a stack of amorphous layers, the thickness of each layer in the stack being smaller than or equal to 20 nm.
Claims16
A selection element comprising, in a first portion, a stack of at least two amorphous layers, the thickness of each layer in the stack being greater than 1 nm and smaller than or equal to 20 nm, wherein:
- the stack comprises at least one assembly of first layers and one assembly of second layers, the first and second layers being made of different materials;
- the first layers are made of an alloy comprising a group-15 element and a group-16 element;
- and
- the second layers consist of one or more, nitrogen-doped, oxygen-doped, or carbon-doped group-14 elements.
A selection element comprising, in a first portion, a stack of at least two amorphous layers, the thickness of each layer in the stack being greater than 1 nm and smaller than or equal to 20 nm, wherein:
- the stack comprises at least one assembly of first layers and one assembly of second layers, the first and second layers being made of different materials;
- the first layers are made of an alloy comprising a group-15 element and a group-16 element;
- the second layers consist of one or more, nitrogen-doped, oxygen-doped, or carbon-doped group-14 elements;
- and
- the second layers consist of doped silicon or germanium.
A method of manufacturing a selection element comprising forming a stack of at least two amorphous layers, the thickness of each layer being greater than 1 nm and smaller than or equal to 20 nm, wherein:
- the stack comprises at least one assembly of first layers and one assembly of second layers, the first and second layers being made of different materials;
- the first layers are made of an alloy comprising a group-15 element and a group-16 element;
- and
- the second layers consist of one or more, nitrogen-doped, oxygen-doped, or carbon-doped group-14 elements.
A selection element comprising, in a first portion, a stack of at least two amorphous layers, the thickness of each layer in the stack being greater than 1 nm and smaller than or equal to 20 nm, wherein:
- the stack comprises at least one assembly of first layers and one assembly of second layers, the first and second layers being made of different materials;
- the first layers are made of an alloy comprising a group-15 element and a group-16 element;
- the second layers consist of one or more doped or undoped group-14 elements;
- the second layers consist of a nitrogen-doped germanium alloy, and
- the first layers are made of an alloy of antimony and of selenium.
Dependencies are inferred from the claim text.