Semiconductor device and method for forming the same
AssigneeUnited Microelectronics Corp.
InventorChih-Wei Kuo
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AssigneeUnited Microelectronics Corp.
InventorChih-Wei Kuo
Estimating the term…
A semiconductor device includes a substrate having a logic region and a memory region, a first interlayer dielectric layer on the substrate, and a second interlayer dielectric layer disposed on and directly contacting a top surface of the first interlayer dielectric layer. A portion of the top surface of the first interlayer dielectric layer on the memory region is lower than another portion of the top surface of the first interlayer dielectric layer on the logic region. A memory stack structure is disposed in the first interlayer dielectric layer on the memory region. A passivation layer covers a top surface and sidewalls of the memory stack structure and is in direct contact with the second interlayer dielectric layer. An upper contact structure penetrates through the second interlayer dielectric layer and the passivation layer on the top surface of the memory stack structure and directly contacts the memory stack structure.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.