Heterogeneous integration chip of micro fluid actuator

A heterogeneous integration chip of a micro fluid actuator, comprising:

• a first substrate comprising at least one first chamber;
• a first insulation layer disposed on the first substrate;
• a first conductive layer disposed on the first insulation layer and comprising at least one electrode pad;
• a piezoelectric layer disposed on the first conductive layer;
• a second conductive layer disposed on the piezoelectric layer, wherein at least one actuation region is collaboratively defined by the first conductive layer, the piezoelectric layer and the second conductive layer;
• a second substrate assembled to the first substrate to define at least one second chamber and comprising at least one orifice, at least one fluid flowing channel and at least one third chamber, wherein the positions of the at least one first chamber of the first substrate, the at least one second chamber of the second substrate, the at least one orifice, the at least one fluid flowing channel and the at least one third chamber are corresponding to the at least one actuation region;
• a control element disposed in the second substrate;
• at least one perforated trench penetrated from the at least one electrode pad to the second substrate;
• and
• at least one conductor filled in the at least one perforated trench.