US 12,009,803 B2 · Bulk acoustic wave resonator, filter and radio frequency communication system

Abstract

A bulk acoustic wave resonator, a filter, and a radio frequency communication system are provided. The bulk acoustic wave resonator includes a substrate and a bottom electrode layer, where a cavity is formed therebetween. The bulk acoustic wave resonator also includes a piezoelectric layer formed on the bottom electrode layer and over the cavity, and a top electrode layer formed over the piezoelectric layer. At least one of the bottom electrode layer and the top electrode layer has a convex portion or concave portion. The convex portion is located in a region of the cavity and is protruded facing away from a bottom of the cavity, and the concave portion is located in the region of the cavity and is recessed towards the bottom of the cavity. Each of the convex portion and the concave portion is located in a peripheral region surrounding the piezoelectric layer.

Claims20

Dependent claims

A bulk acoustic wave resonator, comprising:

a substrate;
a bottom electrode layer, disposed over the substrate, wherein a cavity is formed between the bottom electrode layer and the substrate;
and
a piezoelectric layer, formed on the bottom electrode layer and over the cavity;
a top electrode layer, formed over the piezoelectric layer, wherein:
each of the bottom electrode layer and the top electrode layer has a convex portion or concave portion, wherein the convex portion is located in a region of the cavity and is protruded facing away from a bottom of the cavity, the concave portion is located in the region of the cavity and is recessed towards the bottom of the cavity, and each of the convex portion and the concave portion is located in a peripheral region surrounding the piezoelectric layer.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/449,836Filed 4 Oct 2021 · continuation

Priority

CN 201910272252.24 Apr 2019

Published

US 2022/0029603 A127 Jan 2022

Granted

11 Jun 2024

Term ends

Not estimatedThe source records don’t support an estimate.

Classification9 codes

H03H 9/173
Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume: air-gaps
H03H 3/02
For the manufacture of electromechanical resonators or networks: for the manufacture of piezoelectric or electrostrictive resonators or networks
H03H 9/02015
Of bulk acoustic wave devices: characteristics of piezoelectric layers, e.g. cutting angles
H03H 9/02118
Means for compensation or elimination of undesirable effects: of lateral leakage between adjacent resonators

Family

PCT/CN2019/105094Parent of this continuation · filed 10 Sep 2019

PCT/CN2019/105089Parent of this continuation · filed 10 Sep 2019

PCT/CN2019/105093Parent of this continuation · filed 10 Sep 2019

PCT/CN2019/105087Parent of this continuation · filed 10 Sep 2019

PCT/CN2019/105088Parent of this continuation · filed 10 Sep 2019

PCT/CN2019/105091Parent of this continuation · filed 10 Sep 2019

PCT/CN2019/105092Parent of this continuation · filed 10 Sep 2019

PCT/CN2019/105096Parent of this continuation · filed 10 Sep 2019

US 2022/0029603 A1Pre-grant publication · published 27 Jan 2022

US 12,009,803 B2This patent

From the US filing history. Foreign family members aren’t listed.

Bulk acoustic wave resonator, filter and radio frequency communication system

Life of this patent

Bulk acoustic wave resonator, filter and radio frequency communication system

Life of this patent

Abstract

Claims20