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US 12,009,800 B2Granted
Elastic wave device, splitter, and communication apparatus
AssigneeKYOCERA Corporation
InventorSoichiro Nozoe
Life of this patent
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Abstract
An elastic wave device includes a substrate, a multilayer film located on the substrate, a piezoelectric layer located on the multilayer film, and an IDT electrode located on the piezoelectric layer. The IDT electrode includes electrode fingers each having a large width from a portion connected to a busbar to a position overlapping tip ends of the other electrode fingers when viewed in an arrangement direction of the electrode fingers.
Claims10
An elastic wave device comprising:
- a piezoelectric layer;
- a plurality of resonators each including an IDT electrode located on the piezoelectric layer;
- and
- a protective film located on the plurality of resonators,
- wherein the IDT electrode includes
- a first busbar and a second busbar that are connected to potentials different from each other and that are disposed with a distance therebetween, and
- first electrode fingers and second electrode fingers that are alternately arranged in an elastic wave propagation direction, the first electrode fingers being connected to the first busbar and extending toward the second busbar, the second electrode fingers being connected to the second busbar and extending toward the first busbar,
- each first electrode finger having a wide portion extending from a portion connected to the first busbar to a position overlapping tip ends of the second electrode fingers when viewed in an arrangement direction of the first electrode fingers and the second electrode fingers, the wide portion having a width greater than a width, of the first electrode finger, at a vicinity of a center of an intersection region of the first electrode fingers and the second electrode fingers, and
- wherein the piezoelectric layer has a thickness of less than 1.5p, where p denotes a pitch of the electrode fingers of the IDT electrode.
6 more elements
An elastic wave device comprising:
- a piezoelectric layer;
- a plurality of resonators each including an IDT electrode located on the piezoelectric layer;
- and
- a protective film located on the plurality of resonators,
- wherein the IDT electrode includes
- a first busbar and a second busbar that are connected to potentials different from each other and that are disposed with a distance therebetween, and
- first electrode fingers and second electrode fingers that are alternately arranged in an elastic wave propagation direction, the first electrode fingers being connected to the first busbar and extending toward the second busbar, the second electrode fingers being connected to the second busbar and extending toward the first busbar,
- each first electrode finger having a wide portion extending from a portion connected to the first busbar to a position overlapping tip ends of the second electrode fingers when viewed in an arrangement direction of the first electrode fingers and the second electrode fingers, the wide portion having a width greater than a width, of the first electrode finger, at a vicinity of a center of an intersection region of the first electrode fingers and the second electrode fingers, and
- wherein the elastic wave device uses an A1-mode Lamb wave.
6 more elements
Dependencies are inferred from the claim text.