Back to results
US 12,009,797 B2Granted
Laterally excited bulk wave device with acoustic mirror
AssigneeSkyworks Solutions, Inc.
InventorRei Goto
Life of this patent
Estimating the term…
Abstract
A laterally excited bulk acoustic wave device is disclosed. The laterally excited bulk acoustic wave device can include a support substrate, a solid acoustic mirror on the support substrate, a piezoelectric layer on the solid acoustic mirror, and an interdigital transducer electrode on the piezoelectric layer. The interdigital transducer electrode is arranged to laterally excite a bulk acoustic wave.
Claims20
A laterally excited bulk acoustic wave device comprising:
- a support substrate;
- a solid acoustic mirror on the support substrate, the solid acoustic mirror being an acoustic Bragg reflector including alternating low impedance layers and high impedance layers, the high impedance layers each having a thickness in a range from about 0.14 λp to 0.3 λp or from about 0.35 λp to 0.45 λp, and the high impedance layers each having a thickness in a range from about 0.1 λp to 0.3 λp, in which λp is a wave length of longitudinal wave velocity, the thickness of the high impedance layers and the thickness of the low impedance layers being different;
- a piezoelectric layer on and in contact with at least a portion the solid acoustic mirror;
- and
- an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode overlapping the portion of the solid acoustic mirror, the interdigital transducer electrode arranged to laterally excite a bulk acoustic wave.
2 more elements
An acoustic wave filter comprising:
- a laterally excited bulk acoustic wave resonator including a solid acoustic mirror on a first substrate, a piezoelectric layer on and in contact with at least a portion of the solid acoustic mirror, and an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode overlapping the portion of the solid acoustic mirror, the solid acoustic mirror being an acoustic Bragg reflector including alternating low impedance layers and high impedance layers, the high impedance layers each having a thickness in a range from about 0.14 λp to 0.3 λp or from about 0.35 λp to 0.45 λp, and the high impedance layers each having a thickness in a range from about 0.1 λp to 0.3 λp, in which λp is a wave length of longitudinal wave velocity, the thickness of the high impedance layers and the thickness of the low impedance layers being different;
- and
- a plurality of acoustic wave resonators, the laterally excited bulk acoustic wave resonator and the plurality of acoustic wave resonators together configured to filter a radio frequency signal.
A radio frequency module comprising:
- an acoustic wave filter having a laterally excited bulk acoustic wave resonator and a plurality of acoustic wave resonators, the laterally excited bulk acoustic wave resonator including a solid acoustic mirror on a first substrate, a piezoelectric layer on and in contact with at least a portion of the solid acoustic mirror, and an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode overlapping the portion of the solid acoustic mirror, the solid acoustic mirror being an acoustic Bragg reflector including alternating low impedance layers and high impedance layers, the high impedance layers each having a thickness in a range from about 0.14 λp to 0.3 λp or from about 0.35 λp to 0.45 λp, and the high impedance layers each having a thickness in a range from about 0.1 λp to 0.3 λp, in which λp is a wave length of longitudinal wave velocity, the thickness of the high impedance layers and the thickness of the low impedance layers being different;
- and
- a radio frequency circuit element coupled to the acoustic wave filter, the acoustic wave filter and the radio frequency circuit element being enclosed within a common package.
Dependencies are inferred from the claim text.