Self-aligned block for vertical FETs
AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Junli Wang, Choonghyun Lee, Alexander Reznicek
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AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Junli Wang, Choonghyun Lee, Alexander Reznicek
Estimating the term…
A vertical FET includes a channel fin between a bottom source/drain (S/D) region and a top S/D region, a gate upon a sidewall of the channel fin, a top metallization upon the top S/D region, a first contact metallization connected to the gate, a second contact metallization connected to the bottom S/D region, a first vertical liner between a portion of the gate and the first contact metallization, and a second vertical liner between the top metallization and the second contact metallization. The vertical FET may be fabricated by forming a self-aligned block and utilizing the self-aligned block to e.g., prevent gate to gate shorting during replacement gate formation or processing.
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.