Semiconductor device and electronic system including the same

A semiconductor device, comprising a cell structure stacked on a peripheral circuit structure, wherein:

• the cell structure includes:
• a plurality of gate electrode layers stacked on a first substrate;
• a plurality of channel regions vertically penetrating the gate electrode layers;
• a first interlayer dielectric layer on the first substrate and covering the gate electrode layers and the channel regions;
• and
• a plurality of first metal pads exposed at the first interlayer dielectric layer and connected to the gate electrode layers and the channel regions,
• the peripheral circuit structure includes:
• at least one transistor on a second substrate;
• a second interlayer dielectric layer on the second substrate and covering the transistor;
• and
• a plurality of second metal pads exposed at the second interlayer dielectric layer and connected to the transistor,
• the plurality of first metal pads include at least one first sub-pad and at least one second sub-pad that are adjacent to each other,
• the plurality of second metal pads include at least one third sub-pad and at least one fourth sub-pad that are adjacent to each other,
• the at least one first sub-pad and the at least one third sub-pad are coupled to each other, and a width of the at least one first sub-pad is greater than a width of the at least one third sub-pad,
• the at least one second sub-pad and the at least one fourth sub-pad are coupled to each other, and a width of the at least one fourth sub-pad is greater than a width of the at least one second sub-pad,
• a distance between a lateral surface of the at least one first sub-pad and a lateral surface of the at least one second sub-pad adjacent to the at least one first sub-pad is substantially the same as a distance between a lateral surface of the at least one third sub-pad and a lateral surface of the at least one fourth sub-pad adjacent to the at least one third sub-pad, and
• the width of the at least one first sub-pad is substantially the same as the width of the at least one fourth sub-pad, and the width of the at least one second sub-pad is substantially the same as the width of the at least one third sub-pad.