Slot contacts and method forming same

A structure comprising:

• a first source/drain region and a second source/drain region;
• a first source/drain contact plug and a second source/drain plug over and electrically connected to the first source/drain region and the second source/drain region, respectively;
• a first metallic feature and a second metallic feature over and contacting the first source/drain contact plug and the second source/drain contact plug, respectively;
• a first dielectric hard mask between and contacting the first metallic feature and the second metallic feature;
• and
• a second dielectric hard mask and a third dielectric hard mask overlapping the first source/drain contact plug and the second source/drain contact plug, respectively, wherein the second dielectric hard mask and the third dielectric hard mask are on opposite sides of a combined region that comprises the first metallic feature, the second metallic feature, and first dielectric hard mask.

A structure comprising:

• a source/drain region;
• a source/drain contact plug overlapping the source/drain region;
• a first dielectric hard mask overlapping the source/drain contact plug;
• a metallic feature overlapping the source/drain contact plug, wherein a first sidewall of the first dielectric hard mask is in contact with a second sidewall of the metallic feature;
• an inter-layer dielectric and a contact etch stop layer;
• and
• a second dielectric hard mask overlapping the inter-layer dielectric and the contact etch stop layer, wherein the second dielectric hard mask contacts both of a third sidewall of the source/drain contact plug and a fourth sidewall of the metallic feature, and wherein the second sidewall and the fourth sidewall are opposing sidewalls of the metallic feature.