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US 12,009,241 B2Granted
Vertical batch furnace assembly with detector to detect cassette
AssigneeASM IP Holding B.V.
InventorChristianus G. M. de Ridder
Life of this patent
Estimating the term…
Abstract
Vertical batch furnace assembly for processing wafers comprising a cassette handling space with a cassette storage, and a cassette handling mechanism. The cassette handling mechanism comprises a cassette handler which is configured to transfer wafer cassettes between cassette storage positions and a wafer transfer position by supporting and moving the wafer cassettes on a cassette handler arm. The cassette handler arm is provided with a detector to detect a cassette in a detection area. The cassette handler moves the detection area of the detector towards one of the cassette storage positions to detect whether a cassette is present.
Claims19
A vertical batch furnace assembly for processing wafers provided with a cassette handling space constructed and arranged to handle wafer cassettes for storing wafers, the space comprising:
- at least one process chamber;
- at least one in/out port;
- a wafer transfer position, wherein the wafer transfer position is configured to hold one wafer cassette at a time;
- a plurality of cassette storage positions configured to store a plurality of wafer cassettes;
- at least one storage carousel comprising at least one of the plurality of cassette storage positions;
- a rotatable cassette storage carousel comprising at least another one of the plurality of cassette storage positions, wherein the rotatable cassette storage carousel is configured to rotate around a vertical storage carousel axis,
- a swapper carousel, wherein the swapper carousel comprises a plurality of cassette support surfaces, wherein the swapper carousel is rotatable around a vertical swapper axis, wherein the swapper carousel is configured to transfer each of the plurality of cassette support surfaces to at least one cassette load/retrieve positions and to the wafer transfer position, wherein the vertical storage carousel axis is aligned with the vertical swapper axis,
- a wafer handler configured to transfer at least one wafer from a wafer cassette to each of the at least one process chamber while the wafer cassette is on the wafer transfer position;
- a first cassette handler comprising a first cassette handler arm;
- and
- a second cassette handler comprising a second cassette handler arm;
- wherein the plurality of cassette storage positions comprises a first subset of cassette storage positions and a second subset of cassette storage positions, wherein the first subset of cassette storage positions does not comprise cassette storage positions of the second subset of cassette storage positions, and wherein the second subset of cassette storage positions does not comprise cassette storage positions of the first subset of cassette storage positions,
- wherein the first cassette handler arm is configured to be able to reach the first subset of cassette storage positions of the plurality of cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port,
- wherein the second cassette handler arm is configured to be able to reach the second subset of cassette storage positions of the plurality of cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port,
- wherein each of the cassette handlers is configured to transfer wafer cassettes to and from cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port, while supporting the wafer cassettes on the cassette handler arm, wherein the cassette handler arm is provided with a detector to detect a cassette that is spaced apart from the cassette handler arm, and wherein each of the cassette handlers is constructed and arranged to move the cassette handler arm to a position in which the cassette handler arm is spaced apart from, and the detector is positioned to transmit signals in a direction of, one of the plurality of cassette storage positions, and wherein the detector detects, with the cassette handler arm in the position, whether a cassette is present at said one cassette storage position.
12 more elements
A vertical batch furnace assembly for processing wafers provided with a cassette handling space constructed and arranged to handle wafer cassettes for storing wafers, the space comprising:
- at least one process chamber;
- at least one in/out port;
- a wafer transfer position, wherein the wafer transfer position is configured to hold one wafer cassette at a time;
- a wafer handler configured to transfer at least one wafer from a wafer cassette to each of the at least one process chamber while the wafer cassette is on the wafer transfer position;
- a plurality of cassette storage positions configured to store a plurality of wafer cassettes;
- at least one storage carousel comprising at least one of the plurality of cassette storage positions;
- a rotatable cassette storage carousel comprising at least another one of the plurality of cassette storage positions, wherein the rotatable cassette storage carousel is configured to rotate around a vertical storage carousel axis,
- a swapper carousel, wherein the swapper carousel comprises a plurality of cassette support surfaces, wherein the swapper carousel is rotatable around a vertical swapper axis, wherein the swapper carousel is configured to transfer each of the plurality of cassette support surfaces to at least one cassette load/retrieve positions and to the wafer transfer position, wherein the vertical storage carousel axis is aligned with the vertical swapper axis,
- a first cassette handler comprising a first cassette handler arm;
- and
- a second cassette handler comprising a second cassette handler arm;
- wherein the plurality of cassette storage positions comprises a first subset of cassette storage positions and a second subset of cassette storage positions, wherein the first subset of cassette storage positions does not comprise cassette storage positions of the second subset of cassette storage positions, and wherein the second subset of cassette storage positions does not comprise cassette storage positions of the first subset of cassette storage positions,
- wherein the first cassette handler arm is configured to be able to reach the first subset of cassette storage positions of the plurality of cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port,
- wherein the second cassette handler arm is configured to be able to reach the second subset of cassette storage positions of the plurality of cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port,
- wherein each of the cassette handlers is configured to transfer wafer cassettes to and from cassette storage positions, the wafer transfer position, and the at least one in/out port, while supporting the wafer cassettes on a cassette handler arm,
- wherein the cassette handler arm is provided with a detector,
- wherein the cassette handler arm supports a gripper constructed to handle at least one of the wafer cassettes positioned in one of the cassette storage positions,
- wherein the detector is mounted on the central, longitudinal axis of the gripper,
- wherein each of the cassette handlers is constructed and arranged to move the cassette handler arm to position the gripper proximate to one of the cassette storage positions, and
- wherein the detector detects whether a cassette is present in the one of the cassette storage positions and, when present, an orientation of the cassette relative to the central, longitudinal axis.
17 more elements
A vertical batch furnace assembly for processing wafers provided with a cassette handling space constructed and arranged to handle wafer cassettes for storing wafers, the space comprising:
- at least one process chamber;
- at least one in/out port;
- a wafer transfer position, wherein the wafer transfer position is configured to hold one wafer cassette at a time;
- a wafer handler configured to transfer at least one wafer from a wafer cassette to each of the at least one process chamber while the wafer cassette is on the wafer transfer position;
- at least one wall with a closeable maintenance opening;
- a plurality of cassette storage positions configured to store a plurality of wafer cassettes;
- a rotatable cassette storage carousel comprising at least one of the cassette storage positions, wherein the rotatable cassette storage carousel is configured to rotated around a vertical storage carousel axis;
- a plurality of storage racks comprising at least another one of the cassette storage positions, wherein the plurality of storage racks are disposed on a wall;
- and
- a swapper carousel, wherein the swapper carousel comprises a plurality of cassette support surfaces, wherein the swapper carousel is rotatable around a vertical swapper axis, wherein the swapper carousel is configured to transfer each of the plurality of cassette support surfaces to at least one cassette load/retrieve positions and to the wafer transfer position, wherein the vertical storage carousel axis is aligned with the vertical swapper axis,
- wherein the cassette handling space is accessible via the closeable maintenance opening and wherein at least one of the plurality of storage racks is removable from the cassette handling space through the closeable maintenance opening;
- and
- a cassette handler configured to transfer wafer cassettes to and from cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port, while supporting the wafer cassettes on a cassette handler arm, wherein the cassette handler arm is provided with a detector to detect a cassette without contacting the cassette, wherein the cassette handler is constructed and arranged to move the cassette handler arm to a position in which the cassette handler arm is spaced apart from one of the plurality of cassette storage positions, and wherein the detector detects whether a cassette is present at said one cassette storage position.
10 more elements
Dependencies are inferred from the claim text.