Quick-detachable valve, substrate container provided with the same, and method of loading and unloading the same
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh
Life of this patent
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Abstract
Provided is a quick-release valve including: a quick-release member having a collar detachably coupled to a bottom opening of a base; and a sleeve having a flow passage for allowing a gas to enter or exit a substrate container. The collar has a pair of ear portions extending outward therefrom along a diameter direction and a handle extending outward therefrom along a radius direction. The ear portions are at a height substantially different from the handle.
Claims22
A quick-release valve, adapted for a substrate container, the substrate container having a cover plate and a bottom plate, the quick-release valve comprising:
- a quick-release member having a collar, the collar having an inner diameter and being detachably coupled to an opening of the bottom plate;
- a sleeve having a flow passage for allowing a gas to enter or exit the substrate container, wherein the sleeve has an outer diameter at least greater than the inner diameter of the collar;
- and
- a valve disposed in the flow passage to restrict flowing direction of the gas,
- wherein the collar has a pair of ear portions extending outward therefrom along a diameter direction and a handle extending outward therefrom along a radius direction, with the ear portions being at a height substantially different from the handle.
A substrate container comprising a base, the base comprising a cover plate and a bottom plate, the bottom plate having an inner side and an outer side, wherein the bottom plate has at least one opening formed and extending from the inner side to the outer side thereof and adapted for receiving a quick-release valve, the quick-release valve comprising:
- a quick-release member having a collar;
- a sleeve having a flow passage for allowing a gas to enter or exit the substrate container;
- and
- a valve disposed in the flow passage to restrict flowing direction of the gas,
- wherein the collar has a pair of ear portions extending outward therefrom along a diameter direction and a handle extending outward therefrom along a radius direction, when the quick-release member is coupled to the opening, the handle is on the outer side of the bottom plate, whereas the pair of ear portions are on the inner side of the bottom plate, thereby allowing the collar to prevent the sleeve detached from the opening.
A method for mounting a quick-release valve, adapted for mounting at least one quick-release valve on a substrate container, the quick-release valve comprising a quick-release member having a collar, a sleeve with a flow passage, and a valve, the collar having a pair of ear portions extending outward therefrom along a diameter direction and a handle extending outward therefrom along a radius direction, the substrate container comprising a base, the base having a cover plate and a bottom plate, the bottom plate having at least one opening formed thereon, the cover plate having a fitting portion corresponding in position to the opening, the mounting method comprising the steps of:
- placing the valve in the flow passage of the sleeve;
- connecting the sleeve to the fitting portion to form a hermetic seal between the sleeve and an inner side of the fitting portion;
- and
- passing the pair of ear portions through the opening to allow the handle to be movably in contact with an outer side of the bottom plate and allow the pair of ear portions to be on an inner side of the bottom plate, so as to prevent the sleeve detached from the opening.
Dependencies are inferred from the claim text.