Electrostatic substrate cleaning system and method

An apparatus comprising:

• a roller assembly;
• and
• a disposable electrode ribbon loaded on the roller assembly, wherein the disposable electrode ribbon includes a positive electrode and a negative electrode, wherein the disposable electrode ribbon is configured to electrostatically clean a substrate by electrostatically removing particles from the substrate,
• wherein the roller assembly is configured to advance the disposable electrode ribbon following cleaning of the substrate.

A method of cleaning a substrate comprising:

• transferring a substrate from a substrate storage receptable to a substrate stage;
• actuating, with the substrate stage, the substrate to a position under a cleaning head;
• actuating, with a cleaning lift assembly, the substrate to a selected cleaning distance above the substrate;
• activating a disposable electrode ribbon including a positive electrode and a negative electrode to electrostatically clean a surface of the substrate by removing particles from the substrate, wherein the disposable electrode ribbon is activated by applying a bias voltage between the positive electrode and the negative electrode;
• and
• advancing a roller to expose an unused portion of the disposable electrode ribbon.