Deposition equipment with adjustable temperature source

A method, comprising:

• providing a substrate onto a base station of an apparatus, the apparatus further including heating lamps fixed relative to the base station and a laser heating element movable relative to the base station, the laser heating element being operable to generate a columnated radiation;
• initiating rotation of the substrate;
• initiating heating from the first heating element on the substrate;
• moving the laser heating element to direct heating to a region of the substrate;
• and
• executing a deposition recipe under heating provided by the heating lamps and by the laser heating element, wherein the moving of the second heating element includes vertically moving the second heating element along a direction perpendicular to a top surface of the base station and in response to a leveling motion of the base station.

A method, comprising:

• providing a substrate onto a base station of an apparatus, wherein the apparatus further includes heating lamps fixed relative to the base station and a laser heating element is slidably attached to a slide fixed relative to the base station and is operable to generate a columnated radiation;
• initiating rotation of the substrate;
• initiating heating from the first heating element on the substrate;
• and
• executing a deposition recipe under heating provided by the heating lamps and the laser heating element, wherein the executing of the deposition recipe includes executing the deposition recipe while vertically moving the second heating element along a direction perpendicular to a top surface of the base station.