Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facility

A transport apparatus of a treatment apparatus for transporting a substrate into or out of a treatment chamber of the treatment apparatus, the treatment chamber having a horizontally extending receiving plate and the transport apparatus having a substrate carrier configured to transport the substrate into the treatment chamber and position the substrate on a first surface of the receiving plate, wherein the substrate carrier is further configured to hold the substrate on the receiving plate during the treatment of the substrate in the treatment chamber, and the substrate carrier comprises:

• a horizontally extending holding area configured to retain the substrate thereon formed of an even and uniform first surface that faces the substrate, the holding area being configured such that the shape of said holding area substantially corresponding to the shape of a rear side of the substrate and the area size of said holding area being substantially the same as the area size of the rear side of the substrate, the holding area being configured such that the substrate is held with its whole rear side in engagement with the holding area merely by its weight, and
• one or a plurality of gripping arms, each of the gripping arms being connected to the holding area and extending beyond said holding area in a horizontal direction,
• wherein the substrate carrier is configured such that the substrate is retained on the holding area during said transporting the substrate into or out of the treatment apparatus, with the entirety of the rear side of the substrate resting on the holding area, and
• wherein the entirety of the substrate carrier is configured to reside within the treatment chamber during treatment of the substrate by the treatment apparatus.