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US 12,009,179 B2Granted
Bias supply control and data processing
AssigneeAdvanced Energy Industries, Inc.
InventorHien Minh Nguyen
Life of this patent
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Abstract
Bias supplies and plasma processing systems are disclosed. One bias supply comprises an output node, a return node, and a switch network and at least one power supply coupled to the output node and the return node. The switch network and the at least one power supply configured, in combination, to apply an asymmetric periodic voltage waveform and provide a corresponding current waveform at the output node relative to the return node.
Claims18
A bias supply comprising:
- an output node;
- a switch network and at least one power supply coupled to the output node the switch network and the at least one power supply configured, in combination, to apply an asymmetric periodic voltage waveform and provide a corresponding current waveform at the output node, wherein each cycle of the asymmetric periodic voltage waveform includes a first portion that begins with a first negative voltage and changes to a positive peak voltage during the first portion, the asymmetric periodic voltage waveform also changes from the first portion to a third voltage level during a second portion, and the asymmetric periodic voltage waveform comprises a third portion that includes a voltage ramp from between the third voltage level and a fourth voltage level;
- a metrology component configured to receive and sample voltage signals indicative of at least a portion of the asymmetric periodic voltage waveform to provide a digital representation of the at least a portion asymmetric periodic voltage waveform;
- and
- a data processing module configured to adjust the digital representation based upon an inductance coupled to the output node.
2 more elements
A method for applying a periodic voltage comprising:
- applying an asymmetric periodic voltage waveform at an output node, wherein each cycle of the asymmetric periodic voltage waveform includes a first portion that begins with a first negative voltage and changes to a positive peak voltage during the first portion, the asymmetric periodic voltage waveform also changes from the positive peak voltage to a third voltage level during a second portion, and the asymmetric periodic voltage waveform comprises a third portion that includes a voltage ramp from between the third voltage level and a fourth voltage level;
- receiving and sampling voltage signals indicative of the periodic voltage waveform to produce a digital representation of the at least a portion asymmetric periodic voltage waveform;
- and
- adjusting the digital representation based upon an inductance coupled to the output node.
1 more element
A bias supply to apply a periodic voltage comprising:
- an output node;
- a switch network and at least one power supply to apply an asymmetric periodic voltage waveform relative to the output node, wherein each cycle of the asymmetric periodic voltage waveform includes a first portion that begins with a first negative voltage and changes to a positive peak voltage during the first portion, the asymmetric periodic voltage waveform also changes from the positive peak voltage to a third voltage level during a second portion, and the asymmetric periodic voltage waveform comprises a third portion that includes a voltage ramp from between the third voltage level and a fourth voltage level;
- a metrology component configured to receive and sample voltage signals indicative of the asymmetric periodic voltage waveform to provide a digital representation of the asymmetric periodic voltage waveform;
- and
- a processor and/or a field programmable gate array coupled to nonvolatile memory, the nonvolatile memory comprising non-transitory, processor executable instructions, the instructions comprising instructions to:
- receive the digital representation of the asymmetric periodic voltage waveform;
- and
- adjust the digital representation based upon an inductance coupled to the output node.
5 more elements
Dependencies are inferred from the claim text.