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US 12,009,174 B2Granted
Drawing apparatus and deflector
AssigneeNuFlare Technology, Inc.
InventorsKazuhiro Kishi, Munehiro Ogasawara
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AssigneeNuFlare Technology, Inc.
InventorsKazuhiro Kishi, Munehiro Ogasawara
Estimating the term…
A blanking deflector according to an embodiment includes: a first electrode comprising a first insulator, a first material film coating all surfaces of the first insulator and having lower resistance than the first insulator, and a first low-resistance film coating part or all of surfaces of the first material film and having lower resistance than the first material film; and a second electrode comprising a second insulator, a second material film coating all surfaces of the second insulator and having lower resistance than the second insulator, and a second low-resistance film coating part or all of surfaces of the second material film and having lower resistance than the second material film, wherein the blanking deflector controls whether to irradiate a specimen with a charged particle beam by causing the charged particle beam to pass between the first electrode and the second electrode.
A blanking deflector comprising:
A charged particle beam apparatus comprising:
Dependencies are inferred from the claim text.