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US 12,007,797 B2Granted
Flow rate control device and flow rate control method
AssigneeFujikin Incorporated
InventorsKatsuyuki Sugita, Kouji Nishino, Naofumi Yasumoto, Kaoru Hirata, Shinya Ogawa, Keisuke Ideguchi
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Abstract
A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.
Claims7
A flow rate control device comprising:
- a control valve provided in a flow path;
- a flow rate measurement unit for measuring a flow rate of a fluid controlled by the control valve;
- and
- a controller,
- wherein the controller controls the opening/closing operation of the control valve to match a measured integral flow rate obtained based on a signal output from the flow rate measurement unit to a target integral flow rate for a pulsed gas supply, and
- wherein the controller includes a difference calculation unit for calculating an integral flow rate difference that is a sum of differences between a ramp control signal generated as an internal command signal according to a set flow rate signal and a signal output from the flow rate measurement unit in a flow rate rise period, and the controller can change a slope of the ramp control signal during the flow rate rise period based on the output of the difference calculation unit.
3 more elements
Dependencies are inferred from the claim text.