Mark detection method and apparatus, and computer-readable storage medium

A mark detection method, comprising:

• acquiring on-off information of marks on a photomask to be manufactured;
• comparing the on-off information with preset on-off information to determine whether the on-off information is consistent with the preset on-off information;
• and
• correcting the on-off information according to the preset on-off information when it is determined that the on-off information is inconsistent with the preset on-off information;
• wherein the acquiring on-off information of marks on a photomask to be manufactured comprises:
• acquiring on-off information of N marks on a photomask to be manufactured, the N marks containing M mark types, both N and M being integers greater than 1;
• wherein before the comparing the on-off information with preset on-off information, the method further comprises:
• establishing M blocks according to the M mark types, one of the blocks containing a plurality of marks belonging to a same mark type;
• and
• merging the M blocks, and setting M identification layers according to the M blocks, one block corresponding to one identification layer;
• wherein the comparing the on-off information with preset on-off information comprises:
• comparing the on-off information of the marks in the merged blocks with preset on-off information according to the identification layers.