Information processing apparatus and information processing method

An information processing apparatus comprising:

• an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a recipe;
• and
• a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit,
• wherein the display control unit is configured to display, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, together with a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen,
• the second lot being processed by the same recipe as a recipe by which the first lot is processed, and
• wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot.

An information processing method comprising:

• acquiring process information about a substrate process, the process information including process data and a recipe;
• and
• controlling a display on a display apparatus based on the acquired process information,
• wherein, control is performed to selectively display, on the display apparatus, a first screen or a second screen,
• wherein the first screen displays the process data of a plurality of lots, on a lot-by-lot basis,
• wherein the second screen simultaneously displays a first process data of a plurality of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen,
• the second lot being processed by the same recipe as a recipe by which the first lot is processed, and
• wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot.

An information processing method comprising:

• acquiring process information about a substrate process, the process information including process data and a recipe;
• and
• controlling a display on a display apparatus based on the acquired process information,
• wherein controlling is configured to display, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, together with a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen,
• the second lot being processed by the same recipe as a recipe by which the first lot is processed, and
• wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot.

A non-transitory computer-readable storage medium that stores a program for causing a computer to execute an information processing method including acquiring and controlling a display,

• wherein process information about a substrate process, the process information including process data and a recipe are acquired, and
• wherein control is performed to selectively display, on the display apparatus, a first screen or a second screen,
• wherein the first screen displays the process data of a plurality of lots, on a lot-by-lot basis,
• wherein the second screen simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen,
• the second lot being processed by the same recipe as a recipe by which the first lot is processed, and
• wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot.

A system comprising:

• an information processing apparatus;
• and
• a pattern forming apparatus configured to form a pattern on a substrate,
• wherein the information processing apparatus manages a plurality of apparatuses including the pattern forming apparatus,
• the information processing apparatus including:
• an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a recipe;
• and
• a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit,
• wherein the display control unit selectively displays, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, and a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen,
• the second lot being processed by the same recipe as a recipe by which the first lot is processed, and
• wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot.

An article manufacturing method comprising:

• forming a pattern on a substrate by a pattern forming apparatus managed by an information processing apparatus;
• and
• performing at least one process from oxidation, film forming, vapor deposition, doping, flattening, etching, resist removing, dicing, bonding, and packaging on the substrate having the pattern formed thereon,
• wherein an article is manufactured from the processed substrate,
• the information processing apparatus including:
• an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a recipe;
• and
• a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit,
• wherein the display control unit performs control to selectively display, on the display apparatus, a first screen that displays the process data of a plurality of lots, on a lot-by-lot basis, and a second screen that simultaneously displays a first process data of a first lot and a second process data of a second lot, on a substrate-by-substrate basis, the first lot being a lot designated from the plurality of lots displayed on the first screen,
• the second lot being processed by the same recipe as a recipe by which the first lot is processed, and
• wherein the second screen displays the first process data of each of a plurality of substrates included in the first lot and the second process data of each of a plurality of substrates included in the second lot.