Self-aligned vertical comb drive assembly

A method, comprising:

• applying a first force to a vertical comb drive assembly to translate a plate, of the vertical comb drive assembly, vertically from a first position wherein a comb rotor, of the vertical comb drive assembly, and a comb stator, of the vertical comb drive assembly, are both in a first plane, to a second position wherein the comb rotor is in the first plane and the comb stator is in a second plane that is parallel to the first plane,
• wherein the first position is distal from a base of the vertical comb drive assembly and the second position is proximal to the base,
• wherein the comb stator is formed by the plate,
• wherein the comb rotor is included in a rotor assembly, the rotor assembly comprising:
• a rotor anchor attached to the base, and
• a moveable element attached to the comb rotor, and
• a rotor hinge attached to the rotor anchor and attached to the moveable element to enable rotation of the moveable element about a single axis that bisects the moveable element;
• wherein the comb stator and the plate are included in a stator assembly, the stator assembly comprising:
• a plate anchor attached to the base, and
• one or more plate hinges to connect the plate to the plate anchor and enable translating the plate vertically from the first position to the second position;
• and
• applying, after applying the first force to move the plate from the first position to the second position, a second force to the vertical comb drive assembly to actuate the comb rotor relative to the comb stator,
• wherein the comb rotor includes a first set of fingers that interact with a second set of fingers included in the comb stator in at least one of the first position or the second position.

A vertical comb drive assembly, comprising:

• a base assembly, comprising
• a substrate and a spacer disposed on the substrate;
• a rotor assembly, comprising:
• a rotor anchor attached to the spacer,
• a comb rotor attached to the rotor anchor and attached to a moveable element by a rotor hinge that enables rotation of the moveable element about a single axis that bisects the moveable element,
• wherein the comb rotor includes a first set of fingers;
• and
• a stator assembly, comprising:
• a plate anchor attached to the spacer,
• a plate,
• a plate hinge to connect the plate to the plate anchor,
• a comb stator formed from the plate,
• wherein the comb stator includes a second set of fingers to interact with the first set of fingers,
• wherein the plate hinge and the plate are movable such that the plate is capable of translating vertically from a first position, wherein the comb rotor and the comb stator are both in a first plane, to a second position, wherein the comb rotor is in the first plane and the comb stator is in a second plane that is parallel to the first plane.