Test circuit and method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsieh-Hung Hsieh, Yen-Jen Chen, Tzu-Jin Yeh
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Abstract
An IC includes a device-under-test (DUT) configured to receive a first AC signal at a first node and output a second AC signal at a second node, the second AC signal being based on the first AC signal, and first and second detection circuits. Each of the first and second detection circuits includes a first gain stage coupled to a corresponding one of the first or second nodes through a first capacitive device, a second gain stage in a cascade arrangement with the first gain stage, and a low-pass filter configured to generate a DC signal based on an output signal of the second gain stage.
Claims20
An integrated circuit (IC) comprising:
- a device-under-test (DUT) configured to receive a first alternating current (AC) signal at a first node and output a second AC signal at a second node, the second AC signal being based on the first AC signal;
- and
- first and second detection circuits, wherein each of the first and second detection circuits comprises:
- a first gain stage coupled to a corresponding one of the first or second nodes through a first capacitive device;
- a second gain stage in a cascade arrangement with the first gain stage;
- and
- a low-pass filter configured to generate a direct current (DC) signal based on an output signal of the second gain stage.
An integrated circuit (IC) comprising:
- a plurality of pads at a top surface of a semiconductor wafer;
- a device-under-test (DUT) configured to receive a first alternating current (AC) signal at a first node and output a second AC signal at a second node, the second AC signal being based on the first AC signal;
- and
- first and second detection circuits, wherein each of the first and second detection circuits comprises:
- a first gain stage coupled to a corresponding one of the first or second nodes through a first capacitive device;
- a second gain stage in a cascade arrangement with the first gain stage;
- and
- a low-pass filter configured to output a direct current (DC) signal to a corresponding pad of the plurality of pads, the DC signal being based on an output signal of the second gain stage.
A method of generating test signals, the method comprising:
- using a device-under-test (DUT) to receive a first alternating current (AC) signal at a first node and output a second AC signal at a second node, the second AC signal being based on the first AC signal;
- and
- using each of first and second detection circuits to:
- use a first gain stage coupled to a corresponding one of the first or second nodes to detect the corresponding first or second AC signal through a first capacitive device;
- use a second gain stage in a cascade arrangement with the first gain stage to generate an output signal based on a gain signal received from the first gain stage;
- and
- use a low-pass filter to generate a direct current (DC) signal based on the output signal of the second gain stage.
Dependencies are inferred from the claim text.