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US 12,007,339 B2Granted
Sample holder, system and method
AssigneeCarl Zeiss SMT GmbH
InventorsThomas Anthony Case, Susan Candell, Naomi Kotwal, Allen Gu, Zheren Wu, Wayne Broderick
Life of this patent
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Abstract
A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.
Claims20
A sample holder, comprising:
- a sample placement surface configured to support a sample to position the sample in a first direction of the sample holder;
- a first alignment portion configured to align the sample in a second direction of the sample holder;
- a second alignment portion configured to align the sample in a third direction of the sample holder;
- a first hook portion;
- and
- a fixing element hooked into the first hook portion, the fixing element configured to press the sample against:
- i) the sample placement surface;
- ii) the first alignment portion;
- and iii) the second alignment portion,
- wherein the first direction is perpendicular to the second direction, the first direction is perpendicular to the third direction, and the second direction is perpendicular to the third direction.
7 more elements
A sample holder, comprising:
- a sample placement surface configured to support a sample to position the sample in a first direction of the sample holder;
- a first alignment portion configured to align the sample in a second direction of the sample holder;
- a second alignment portion configured to align the sample in a third direction of the sample holder;
- a sample receptacle comprising a plurality of sample receiving sections;
- a post to which the sample receptacle is attached;
- a gripper disc to which the post is attached;
- and
- a fixing element configured to press the sample against:
- i) the sample placement surface;
- ii) the first alignment portion;
- and iii) the second alignment portion,
- wherein:
- the first direction is perpendicular to the second direction;
- the first direction is perpendicular to the third direction;
- the second direction is perpendicular to the third direction;
- each sample receiving section comprises a sample placement surface, a first alignment portion and a second alignment portion;
- and
- the post is fixed to the gripper disc in a form-locking manner by a key connection.
15 more elements
Dependencies are inferred from the claim text.