Heterogeneous integration detecting method and heterogeneous integration detecting apparatus

A heterogeneous integration detecting apparatus, comprising:

• a first moving mechanism, comprising a first block and a second block, wherein the first block slidably assembled to the second block;
• an optical system, installed on the first block of the first moving mechanism, wherein the optical system comprises an interference objective lens and an imaging objective lens;
• a sample carrier, configured to carry a sample;
• a second moving mechanism comprising a movable table, wherein the interference objective lens and the imaging objective lens are disposed on the movable table;
• and
• an analyzer, coupled with the optical system to obtain an image output from the optical system, the analyzer comprising a spectrometer configured to detect the spectrum after the interference objective lens switched to the imaging objective lens, and an image-capturing element comprising a camera and a display coupled with the optical system to display a change of the image of the sample in a field of view of the interference objective lens;
• wherein, a first optical axis of the interference objective lens is substantially perpendicular to a surface of the sample by a sliding between the first block and the second block while a relative distance between the sample and the interference objective lens is kept constant,
• wherein the first moving mechanism is a goniometer stage, and the interference objective lens is moved on a spherical surface whose center of the sphere is a center point of the field of view of the interference objective lens on the sample.