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US 12,006,572 B2Granted
Reactor system including a gas distribution assembly for use with activated species and method of using same
AssigneeASM IP Holding B.V.
InventorsXing Lin, Peipei Gao, Prajwal Nagaraj, Mingyang Ma, Wentao Wang, Ion Hong Chao, Alexandros Demos, Paul Ma, Hichem M'Saad
Life of this patent
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Abstract
A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and a showerhead plate downstream of the gas distribution device and the expansion area.
Claims25
A reactor system comprising:
- a first reaction chamber;
- a first gas source;
- a second gas source;
- a first remote plasma unit fluidly coupled to the first reaction chamber;
- a gas transport line connected to the first remote plasma unit;
- a first gas line connected to the gas transport line;
- a second gas transport line connected to the gas transport line;
- a gas distribution assembly that receives activated species from the first remote plasma unit;
- and
- a transport path between the first remote plasma unit and the gas distribution assembly,
- wherein the gas distribution assembly comprises:
- a top section with a singular inlet;
- a gas distribution device coupled to the top section, wherein the gas distribution device comprises a plurality of radially extending channels defined between the top section and an upper surface of the gas distribution device, wherein the gas distribution device comprises one or more holes defined within a lower surface of the gas distribution device;
- a gas expansion area fluidly coupled to the singular inlet by the radially extending channels and each of the one or more holes defined within the lower surface of the gas distribution device;
- and
- a showerhead plate downstream of the gas distribution device and the expansion area,
- wherein the gas distribution device distributes the activated species within the gas expansion area, and
- wherein the transport path is cooled.
15 more elements
A reactor system comprising:
- a first reaction chamber;
- a first gas source;
- a second gas source;
- a first remote plasma unit fluidly coupled to the first reaction chamber;
- a gas transport line connected to the first remote plasma unit;
- a first gas line connected to the gas transport line;
- a second gas transport line connected to the gas transport line;
- a first gas distribution assembly that receives activated species from the first remote plasma unit,
- wherein the first gas distribution assembly comprises:
- a first gas distribution device, wherein the first gas distribution device comprises a plurality of radially extending channels;
- a first gas expansion area;
- and
- a first showerhead plate downstream of the first gas distribution device and the first gas expansion area,
- wherein the first gas distribution device distributes the activated species within the first gas expansion area;
- a second reaction chamber;
- a second gas distribution assembly that receives activated species from the first or a second remote plasma unit;
- and
- a cleaning gas source fluidly coupled to the first reaction chamber by the first remote plasma unit and fluidly coupled to the second reaction chamber by the second remote plasma unit, the cleaning gas source including hydrogen for cleaning a first substrate surface in the first reaction chamber and a second substrate surface in the second reaction chamber,
- wherein the second gas distribution assembly comprises:
- a second gas distribution device;
- a second gas expansion area;
- and
- a second showerhead plate downstream of the second gas distribution device and the second expansion area, and
- wherein the second gas distribution device distributes the activated species within the second gas expansion area.
21 more elements
Dependencies are inferred from the claim text.