Cubic Al-rich AlTiN coatings deposited from ceramic targets
AssigneesOerlikon Surface Solutions AG, PfäFfikon, MOLDINO Tool Engineering, Ltd.
InventorsSiva Phani Kumar Yalamanchili, Denis Kurapov, Tomoya Sasaki, Kazuyuki Kubota
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Abstract
The present invention discloses a non-reactive PVD coating process for producing an aluminium-rich AlxTi1−xN-based thin film having an aluminium content of >75 at-% based on the total amount of aluminium and titanium in the thin film, a cubic crystal structure, and a columnar microstructure, wherein ceramic targets are used as a material source for the aluminium-rich AlxTi1−xN-based thin film.
Claims13
A non-reactive PVD coating process for producing an aluminium-rich AlxTi1−xN-based thin film having an aluminium content of >75 at-% based on the total amount of aluminium and titanium in the thin film, a cubic crystal structure, and a columnar microstructure, wherein ceramic targets are used as a material source for the aluminium-rich AlxTi1−xN-based thin film.
A non-reactive PVD coating process for producing an aluminium-rich AlxTi1−xN-based thin film having an aluminium content of >75 at-% based on the total amount of aluminium and titanium in the thin film, a cubic crystal structure, and a columnar microstructure, wherein ceramic targets are used as a material source for the aluminium-rich AlxTi1−xN-based thin film, wherein the substrate temperature is between 100° C. and 350° C.
Dependencies are inferred from the claim text.