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US 12,006,264 B2Granted
Porous ceramic, member for semiconductor manufacturing apparatus, shower plate and plug
AssigneeKYOCERA Corporation
InventorHiromasa Matsufuji
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Abstract
A porous ceramic of the present disclosure contains yttrium zirconate and yttrium oxide, and at least one of them is a main component. A member for a semiconductor manufacturing apparatus such as a shower plate, a plug or the like in a semiconductor manufacturing apparatus is made of the above porous ceramic.
Claims12
A porous ceramic comprising yttrium zirconate and yttrium oxide, wherein at least one of them is a main component.
Dependencies are inferred from the claim text.