Laser forming non-square edges in transparent workpieces using low intensity airy beams

A method for processing a transparent workpiece, the method comprising:

• directing a pulsed laser beam output by a beam source onto a phase-adjustment device to form a pulsed phase-adjusted laser beam, the pulsed phase-adjusted laser beam comprising pulse bursts having 2 sub-pulses per pulse burst or more;
• and
• directing the pulsed phase-adjusted laser beam through a focusing lens to form a pulsed Airy beam, the focusing lens having a focal point in the transparent workpiece;
• directing the pulsed Airy beam onto a surface of the transparent workpiece, wherein the pulsed Airy beam forms a pulsed Airy beam focal region in the thickness direction of the transparent workpiece near the focal point of the focusing lens, the pulsed Airy beam of the pulsed Airy beam focal region comprising a maximum intensity of from 0.125 TW/cm2 to 50 TW/cm2, the pulsed Airy beam of the pulsed Airy beam focal region inducing absorption in the transparent workpiece, wherein the induced absorption produces a defect curved in the thickness direction of the transparent workpiece;
• wherein the laser beam traverses a diffractive optical element before being directed to the phase-adjustment device, the diffractive optical element modifying the energy distribution of the laser beam.