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US 12,006,207 B2Granted
Pressure sensor including a microelectromechanical transducer and relating pressure-detection method
AssigneeSTMicroelectronics S.r.l.
InventorMario Giuseppe Pavone
Life of this patent
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Abstract
A pressure sensor including: a structure which delimits a main cavity of a closed type, the structure being at least partially deformable as a function of a pressure external to the structure; and a MEMS device, which is arranged in the main cavity and generates an output signal, which is of an electrical type and is indicative of the pressure inside the main cavity.
Claims20
A method, comprising:
- detecting a pressure exerted on a pressure sensor by a solid body arranged on the pressure sensor, the pressure sensor including:
- a structure that is at least partially deformable as a function of an external pressure applied to the structure, the structure including a sealed main cavity within the structure;
- and
- a MEMS (microelectromechanical system) device arranged in the sealed main cavity, wherein the detecting includes:
- the MEMS device detecting a pressure in the sealed main cavity while the solid body exerts the pressure on the pressure sensor, which causes a deformation of the sealed main cavity;
- and
- detecting the pressure exerted by the solid body based on the pressure in the sealed main cavity detected by the MEMS device.
4 more elements
A method, comprising:
- deforming a sealed main cavity within a pressure sensor by exerting a pressure on an external surface of a pressure sensor with a solid body;
- and
- detecting the pressure exerted on the pressure sensor with the solid body by a MEMS (microelectromechanical system) device within the sealed main cavity of the pressure sensor, detecting the pressure exerted on the pressure sensor by the solid body including:
- deforming a deformable structure within a cavity of the MEMS device in fluid communication with the sealed main cavity through a hole extending through the MEMS device to the cavity;
- and
- detecting deformation of the deformable structure with a transducer on the deformable structure.
3 more elements
A method, comprising:
- deforming a first layer of a first stiffness of a pressure sensor towards a sealed main cavity within the pressure sensor by exerting a pressure on a first external surface of the first layer of the pressure sensor;
- and
- detecting the pressure exerted on the pressure sensor with a solid body by a MEMS (microelectromechanical system) device within the sealed main cavity of the pressure sensor, detecting the pressure exerted on the pressure sensor by the solid body including:
- deforming a deformable structure within a cavity of the MEMS device in fluid communication with the sealed main cavity through a hole extending through the MEMS device to the cavity;
- and
- detecting deformation of the deformable structure with a transducer on the deformable structure.
3 more elements
Dependencies are inferred from the claim text.