Suction gripping device, transfer system, and transfer method

A suction gripping device, comprising:

• a pad mechanism mounted to a base, the pad mechanism including:
• a sliding part slidable in a first direction with respect to the base, the sliding part including:
• a suction pad attaching to a workpiece,
• a pipe having the suction pad connected to one end of the pipe, and
• a rod member fixed with respect to the pipe,
• a first guide guiding a sliding direction of the pipe to be in the first direction, the first guide being fixed with respect to the base,
• a second guide guiding a sliding direction of the rod member to be in the first direction, the second guide being fixed with respect to the base, and
• a first coupler and a second coupler coupling the pipe and the rod member and being fixed with respect to the base, wherein
• the first guide and the second guide are positioned between the first coupler and the second coupler in the first direction, and
• the rod member is inserted through the second guide and the pipe is not inserted through the second guide.

A transfer method, comprising:

• using a suction gripping device to grip a first surface of a workpiece with a suction pad, wherein
• the suction gripping device includes:
• a pad mechanism mounted to a base, the pad mechanism including:
• a sliding part including the suction pad, a pipe and a rod member fixed with respect to the pipe, the sliding part being slidable in a first direction with respect to the base, the suction pad attaching to the workpiece and being connected to one end of the pipe, the first surface crossing a sliding direction of the sliding part,
• a first guide guiding a sliding direction of the pipe to be in the first direction, the first guide being fixed with respect to the base,
• a second guide guiding a sliding direction of the rod member to be in the first direction, and
• a first coupler and a second coupler coupling the pipe and the rod member and being fixed with respect to the base, and
• a base driver driving the base,
• the first guide and the second guide are positioned between the first coupler and the second coupler in the first direction,
• the rod member is inserted through the second guide and the pipe is not inserted through the second guide, and
• when the suction pad grips the workpiece, the gripping is performed after an attachment surface of the suction pad contacting the first surface is deformed along the first surface due to a weight of the sliding part.