Retrofittable dry media abatement reactor
AssigneeGlobalFoundries U.S. Inc.
InventorsJustin Weinstein, Kimberly E. Konar
Life of this patent
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AssigneeGlobalFoundries U.S. Inc.
InventorsJustin Weinstein, Kimberly E. Konar
Estimating the term…
A system to abate an emission stream from a semiconductor manufacturing process is disclosed. The system includes a media canister to abate the emission stream in response to an abatement fault in an abatement apparatus. The media canister includes a reaction chamber configured to receive the emission stream in response to the abatement fault, and a dry media disposed within the reaction chamber to abate the emission stream. The dry media includes at least one reactive and/or absorbent material which catalyzes at least one chemical reaction to remove at least one pollutant from the emission stream and yield exhaust substantially free of the at least one pollutant.
A system comprising:
A media canister comprising:
Dependencies are inferred from the claim text.