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US 12,004,426 B2Granted
Terahertz detector and method of manufacturing terahertz detector
AssigneesNuctech Company Limited, Tsinghua University
InventorsZiran Zhao, Yingxin Wang, Meng Chen, Xuming Ma
Life of this patent
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Abstract
A terahertz detector and a method of manufacturing a terahertz detector, wherein the terahertz detector including a substrate (2) and at least one detection unit. Each detection unit includes: a channel material (1) arranged on the substrate, two electrodes (3, 4) respectively in ohmic contact with both ends of the channel material (1) in a longitudinal direction, and a three-dimensional grapheme (5) in direct or indirect thermal contact with the channel material (1).
Claims19
A terahertz detector, comprising:
- a substrate;
- and
- at least one detection unit, wherein each detection unit comprises:
- a channel material arranged on the substrate,
- two electrodes respectively in ohmic contact with both ends of the channel material in a longitudinal direction, and
- a three-dimensional graphene in direct or indirect thermal contact with the channel material,
- wherein the substrate has a U-shaped structure, both ends of the channel material in the longitudinal direction are respectively fixed on both side portions of the U-shaped structure, and the three-dimensional graphene is arranged between a bottom of the U-shaped structure and the channel material.
4 more elements
A method of manufacturing a terahertz detector, comprising:
- preparing a channel material;
- transferring the channel material to a substrate having a U-shaped structure;
- making two electrodes on both ends of the channel material in a longitudinal direction;
- preparing a three-dimensional graphene;
- and
- fixing the three-dimensional graphene to the channel material,
- wherein transferring the channel material to a substrate comprises fixing both ends of the channel material in the longitudinal direction respectively on both side portions of the U-shaped structure, and
- fixing the three-dimensional graphene to the channel material comprises arranging the three-dimensional graphene between a bottom of the U-shaped structure and the channel material.
5 more elements
Dependencies are inferred from the claim text.