Organic light-emitting diode display device and manufacturing method thereof
AssigneeWuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorsWeiwei Yang, Cheng Chen
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Abstract
The present invention provides an organic light-emitting diode display device and a manufacturing method thereof. An inorganic insulating layer covering a gate is formed, and an organic insulating layer is formed on the inorganic insulating layer, which prevents a problem of metal residue occurring in a subsequently formed metal layer during etching due to a steep slope. A groove is defined on a position of the organic insulating layer corresponding to the gate, and a metal component for forming a capacitor with the gate is formed in the groove and disposed corresponding to the gate.
Claims18
An organic light-emitting diode display device, comprising:
- a substrate;
- an active layer formed on the substrate;
- a first insulating layer covering the active layer and the substrate;
- a gate opposite to the active layer and formed on the first insulating layer;
- an inorganic insulating layer covering the gate and the first insulating layer;
- an organic insulating and planarization layer comprising a groove and formed on the inorganic insulating layer, wherein the groove is opposite to the gate and concave toward the gate;
- a metal component formed in the groove and opposite to the gate;
- a second insulating layer at least covering the metal component and the organic insulating and planarization layer;
- a source and a drain formed on the second insulating layer and electrically connected to the active layer through a through-hole at least penetrating through the second insulating layer, the first insulating layer, and the inorganic insulating layer;
- and
- a light-emitting device layer formed on a side of the source and the drain away from the substrate.
A manufacturing method of an organic light-emitting diode display device, comprising a plurality of steps as follows:
- forming an active layer on a substrate;
- forming a first insulating layer covering the active layer and the substrate;
- forming a gate opposite to the active layer on the first insulating layer;
- forming an inorganic insulating layer covering the gate and the first insulating layer;
- forming an organic insulating and planarization layer comprising a groove on the inorganic insulating layer, wherein the groove is opposite to the gate and concave toward the gate;
- forming a metal component in the groove, wherein the metal component is opposite to the gate;
- forming a second insulating layer at least covering the metal component and the organic insulating and planarization layer;
- forming a source and a drain on the second insulating layer, wherein the source and the drain are electrically connected to the active layer through a through-hole at least penetrating through the second insulating layer, the first insulating layer, and the inorganic insulating layer;
- and
- forming a light-emitting device layer on a side of the source and the drain away from the substrate.
Dependencies are inferred from the claim text.