Activated gas generation apparatus
AssigneeToshiba Mitsubishi-Electric Industrial Systems Corporation
InventorsKensuke Watanabe, Ren Arita
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Abstract
In the present invention, a high-voltage side electrode constituent part includes a dielectric electrode and metal electrodes formed on the upper surface of the dielectric electrode. The dielectric electrode has a structure in which a film thickness is continuously changed along an X direction. That is, the film thickness of the right end of the dielectric electrode is set to a thickness dA1; and the film thickness of the left end is set to a thickness dB1 (>dA1), and is continuously increased from the right end to the left end along the X direction.
Claims11
An activated gas generation apparatus comprising:
- a first electrode constituent part;
- a second electrode constituent part provided below said first electrode constituent part;
- and
- an alternating current (AC) power supply part applying an AC voltage to said first and second electrode constituent parts,
- said AC power supply part applying said AC voltage to form a discharge space between said first and second electrode constituent parts, and to generate an activated gas obtained by activating a source gas supplied to said discharge space,
- wherein:
- said first electrode constituent part includes a first dielectric electrode and a first metal electrode selectively formed on an upper surface of said first dielectric electrode;
- said second electrode constituent part includes a second dielectric electrode and a second metal electrode selectively formed on a bottom surface of said second dielectric electrode;
- where said first and second dielectric electrodes face each other in a dielectric space, and where said first and second metal electrodes overlap each other in plan view is defined as said discharge space in a region;
- said first and second metal electrodes are formed so as to extend in an electrode formation direction, a gas supply direction of said source gas crosses to said electrode formation direction:
- said second dielectric electrode includes a plurality of gas spray holes for spraying said activated gas to an outside;
- said activated gas contains a plurality of partial activated gases sprayed from said plurality of gas spray holes;
- said plurality of gas spray holes are formed along said electrode formation direction;
- said discharge space is classified into a plurality of partial discharge spaces corresponding to positions of said plurality of gas spray holes in said electrode formation direction;
- and
- one dielectric electrode being one of said first and second dielectric electrodes has a parameter changing structure in which a discharge voltage contribution parameter is changed along said electrode formation direction so that a plurality of partial discharge voltages generated in said plurality of partial discharge spaces have values different from each other when said AC voltage is applied.
Dependencies are inferred from the claim text.