Edge inspection system for inspection of optical devices

A method of inspection, comprising:

• directing light from a light source to a substrate on an interior support of a stage of an inspection system, the substrate positioned such that an edge of the substrate is aligned with a slit in the inspection system, the slit defined by the interior support and a cover disposed on an exterior support of the stage, wherein the light source is disposed in an interior region of the stage and directs the light through the slit to the edge of the substrate to illuminate one or more optical devices disposed in or on the substrate;
• capturing images of the one or more optical devices;
• and
• inspecting the images for defects of the one or more optical devices, wherein a reflective surface disposed between the interior support and a bottom support of the stage directs the light through the slit.

A method of inspection, comprising:

• forming dicing paths along a perimeter of one or more optical devices disposed in or on a substrate;
• directing light from a light source to a substrate on an interior support of a stage of an inspection system, the substrate positioned such that an edge of the substrate is aligned with a slit in the inspection system, the slit defined by the interior support and a cover disposed on an exterior support of the stage, wherein the light source is disposed in an interior region of the stage and directs the light through the slit to the edge of the substrate to illuminate one or more optical devices disposed in or on the substrate, wherein a reflective surface disposed between the interior support and a bottom support of the stage directs the light through the slit;
• capturing images of the one or more optical devices;
• and
• inspecting the images for defects along the dicing paths disposed around the perimeter of the one or more optical devices.