MEMS actuation system
AssigneeMems Drive (Nanjing) Co., Ltd.
InventorsGuiqin Wang, Matthew Ng, Xiaolei Liu
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Abstract
A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.
Claims19
A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
- a MEMS actuator configured to provide linear three-axis movement, the MEMS actuator including:
- an in-plane MEMS actuator, and
- an out-of-plane MEMS actuator;
- and
- an optoelectronic device coupled to the MEMS actuator;
- wherein the in-plane MEMS actuator includes hybrid actuator including:
- an in-plane MEMS actuator portion including at least two motion stages including a respective polarized magnetic material/magnet associated with each motion stage and having differing polarizations:
- an in-plane electromagnetic actuator portion including a magnetic plate assembly to which at least two magnetic assemblies are attached, including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly, the magnetic assemblies configured to interact with a respective polarized magnetic material/magnet.
A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
- a MEMS actuator configured to provide linear three-axis movement, the MEMS actuator including:
- an in-plane MEMS actuator including an electromagnetic actuator portion, and
- an out-of-plane MEMS actuator;
- and
- an optoelectronic device coupled to the MEMS actuator;
- wherein the in-plane MEMS actuator is a hybrid actuator including:
- at least two respective polarized magnetic material/magnets each associated with a respective motion stage of a MEMS actuator portion of the in-plane MEMS actuator, wherein the at least two respective polarized magnetic material/magnets have a differing polarizations;
- and
- a magnetic plate assembly having at least two magnetic assemblies of the electromagnetic actuator portion configured to interact with a respective polarized magnetic material/magnet, the at least magnetic assemblies including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly.
A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
- a MEMS actuator configured to provide linear multi-axis movement, the MEMS actuator including:
- a hybrid in-plane MEMS actuator portion including at least two motion stages including a respective polarized magnetic material/magnet associated with each motion stage and having differing polarizations;
- and
- an in-plane electromagnetic actuator portion including a magnetic plate assembly having at least two magnetic assemblies configured to interact with a respective polarized magnetic material/magnet, the at least two magnetic assemblies including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly;
- and
- an optoelectronic device coupled to the MEMS actuator.
Dependencies are inferred from the claim text.