Infrared detecting device
AssigneeAsahi Kasei Microdevices Corporation
InventorsOsamu Morohara, Yoshiki Sakurai, Hiromi Fujita, Hirotaka Geka
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AssigneeAsahi Kasei Microdevices Corporation
InventorsOsamu Morohara, Yoshiki Sakurai, Hiromi Fujita, Hirotaka Geka
Estimating the term…
An infrared detecting device is provided. The infrared detecting device includes: a semiconductor substrate; a first layer having a first conductivity type on the semiconductor substrate; a light receiving layer on the first layer; and a second layer having a second conductivity type on the light receiving layer. A part of the first layer, the light receiving layer, and the second layer form a mesa structure. The second layer contains AlzIn1-zSb (0.05<z<0.18). The side surfaces and an upper surface of the mesa structure are covered with the protective layer. A part of an upper surface of the second layer that forms an interface between the second layer and the protective layer has an oxide layer made of a constituent material of the second layer. The oxide layer includes an oxide of Al and has no oxide of Sb.
An infrared detecting device comprising:
Dependencies are inferred from the claim text.