Solid-state image sensor, solid-state imaging device, and method of manufacturing solid-state image sensor

A solid-state image sensor, comprising:

• a semiconductor substrate;
• a charge accumulator disposed in the semiconductor substrate and configured to accumulate charge;
• a photoelectric converter disposed above the semiconductor substrate and configured to convert light to charge;
• and
• a through electrode passing through the semiconductor substrate and electrically connecting the charge accumulator with the photoelectric converter,
• wherein at an end portion on a photoelectric converter side of the through electrode, a cross-sectional area of a conductor positioned at a center of the through electrode in a cut section orthogonal to a through direction of the through electrode gradually increases toward the photoelectric converter along the through direction,
• wherein the photoelectric converter includes:
• a common electrode shared between solid-state image sensors adjacent to each other,
• a readout electrode electrically connected to the through electrode,
• a photoelectric conversion film sandwiched between the common electrode and the readout electrode and configured to convert light to charge, and
• an accumulation electrode facing the common electrode with the photoelectric conversion film and an insulating film interposed therebetween.

A solid-state imaging device comprising a plurality of solid-state image sensors arranged in a matrix,

• each of the solid-state image sensors comprising:
• a semiconductor substrate;
• a charge accumulator disposed in the semiconductor substrate and configured to accumulate charge;
• a photoelectric converter disposed above the semiconductor substrate and configured to convert light to charge;
• and
• a through electrode passing through the semiconductor substrate and electrically connecting the charge accumulator with the photoelectric converter,
• wherein, at an end portion on a photoelectric converter side of the through electrode, a cross-sectional area of a conductor positioned at a center of the through electrode in a cut section orthogonal to a through direction of the through electrode gradually increases toward the photoelectric converter along the through direction, and
• wherein, in a cross section of the through electrode cut along the through direction, an end portion on a photoelectric converter side of the conductor has two first branch portions split from a center axis of the conductor.