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US 12,002,805 B2Granted
Local vertical interconnects for monolithic stack transistors
AssigneeInternational Business Machines Corporation
InventorsHeng Wu, Ruilong Xie, Chen Zhang, Eric Miller
Life of this patent
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Abstract
A method for forming a stacked transistor includes forming a sacrificial cap over a first interconnect of a lower level transistor. The method further includes forming an upper level transistor above the sacrificial cap. The method further includes removing the sacrificial cap to form an opening such that the opening is delimited by the upper level transistor. The method further includes forming a second interconnect in the opening such that the second interconnect is in direct contact with the first interconnect.
Claims7
A semiconductor device, comprising:
- a lower level transistor including a first source, a first drain, a first interconnect in direct contact with one of the first source and the first drain, and a second interconnect in direct contact with the other of the first source and the first drain;
- an upper level transistor including a second source, a second drain, a third interconnect in direct contact with one of the second source and the second drain, and a fourth interconnect in direct contact with the other of the second source and the second drain;
- a dielectric layer arranged between the lower level transistor and the upper level transistor, the dielectric layer including a recess extending to the second interconnect;
- and
- a dielectric cap formed in the recess and arranged in direct contact with the second interconnect,
- wherein the first interconnect and the second interconnect are arranged between the lower level transistor and the upper level transistor.
3 more elements
Dependencies are inferred from the claim text.