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US 12,002,752 B2Granted
Method for manufacturing a fuse component
AssigneeNanya Technology Corporation
InventorsKai-Po Shang, Jui-Hsiu Jao
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Abstract
The present disclosure provides a method for manufacturing a fuse component having a three-dimensional (3D) structure. The method includes providing an active region, forming a first recess region and a second recess region in the active region, disposing a fuse dielectric material in the first recess region and the second recess region, and filling the first recess region and the second recess region with a gate metal material.
Claims7
A method of manufacturing a fuse component, comprising:
- providing an active region;
- forming a first recess region and a second recess region in the active region;
- disposing a fuse dielectric material in the first recess region and the second recess region;
- and
- filling the first recess region and the second recess region with a gate metal material;
- wherein the first recess region and the second recess region are formed between a first isolation structure and a second isolation structure.
3 more elements
Dependencies are inferred from the claim text.