Transport system and determination method

A method of transporting a wafer comprising:

• supporting the wafer with a robot having a hand and transporting the wafer by the robot to an aligner apparatus;
• detecting, by a sensor, a position of the wafer before the robot delivers the wafer to the aligner apparatus while supporting the wafer by the hand;
• and
• determining a positional deviation of the wafer based on a detection value of the sensor, wherein
• determining the positional deviation comprises determining whether or not the positional deviation of the wafer is an allowable value or lower based on the detection value of the sensor,
• in response to determining that the positional deviation of the wafer is the allowable value or lower, a target position of the wafer on the aligner apparatus corrected, and transfer of the wafer by the robot to the aligner apparatus is continued;
• and
• in response to determining that the positional deviation exceeds that allowable value, a holding position of the wafer by the hand is corrected.

A determination method which determines a positional deviation of a wafer during a transfer of the wafer comprising:

• supporting the wafer using a hand of a robot which supports the wafer and transports the wafer to an aligner apparatus comprising a sensor,
• detecting a position of the wafer by using the sensor while supporting the wafer by the hand as the robot delivers the wafer to the aligner apparatus, and
• determining whether a positional deviation of the wafer is an allowable value or lower based on a detection value of the sensor, wherein
• in response to determining that the positional deviation is the allowable value or lower, a target position of the wafer on the aligner apparatus is corrected;
• and
• in response to determining that the positional deviation exceeds the allowable value, a holding position of the wafer by the hand is corrected.

A transport system for transporting a wafer comprising:

• a robot having a hand which supports the wafer and transports the wafer to an aligner apparatus;
• a sensor which detects a position of the wafer before the robot delivers the wafer to the aligner apparatus while supporting the wafer by the hand;
• and
• a determination unit which determines a positional deviation of the wafer based on a detection value of the sensor, wherein
• the determination unit which determines whether or not the positional deviation of the wafer is an allowable value or lower based on the detection value of the sensor,
• in response to the determination unit determining that the positional deviation of the wafer is the allowable value or lower, a target position of the wafer on the aligner apparatus is corrected, and the robot continues to transfer the wafer to the aligner apparatus, and
• in response to the determination unit determining that the positional deviation exceeds the allowable value, a holding position of the wafer by the hand is corrected.