Efem

A transfer system comprising:

• a mounting table configured to mount a container in which a transfer target is accommodated;
• a housing having an opening in communication with an outside of the housing, and configured to define, in the housing, a transfer chamber for transferring the transfer target;
• a base configured to close the opening;
• a gas supplier configured to supply a predetermined gas into the transfer chamber;
• a gas discharger configured to discharge a gas in the transfer chamber;
• a pressure gauge configured to measure a pressure in the transfer chamber;
• and
• a controller electrically connected to the gas discharger and the pressure gauge,
• wherein the base includes:
• a window configured to be capable of moving the transfer target from or to the outside of the housing;
• an opening/closing mechanism configured to be capable of opening and closing the window;
• and
• an accommodation chamber located below the mounting table, and configured to be in communication with the transfer chamber and accommodate a part of the opening/closing mechanism,
• wherein the gas discharger is directly connected to the accommodation chamber, and is configured to discharge gas from the accommodation chamber to thereby discharge the gas in the transfer chamber via the accommodation chamber, and
• wherein the controller is configured to control the gas discharger to adjust a discharge flow rate for the gas in the transfer chamber based on the pressure detected by the pressure gauge such that the pressure in the transfer chamber is higher than an external pressure.