Processing device and processing method for solid structure
AssigneesHighlight Tech Corp., Finesse Technology Co., Ltd.
InventorsChwung-Shan Kou, Wen-Yung Yeh
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Abstract
A processing device and a processing method for a solid structure are used to perform a processing procedure on the solid structure. The processing device for the solid structure of the invention provides energy to the solid structure by various electromagnetic radiation sources to cause the solid structure to generate qualitative changes or defects, that is, to form a modified layer. Stress and/or hardness of the modified layer are/is different from that of other non-processed areas.
Claims21
A processing device for a solid structure for performing a processing procedure, at least comprising:
- a laser source for providing a laser energy to a processing target area of the solid structure in a modification step of the processing procedure;
- and
- a microwave or radio-frequency source for providing a microwave or radio-frequency energy to the solid structure in the modification step of the processing procedure, wherein the processing target area of the solid structure weaken atomic bond structures or change a crystallinity of the processing target area by the laser energy and the microwave or radio-frequency energy, which achieve a forward cycle effect on the processing target area, to become a modified layer.
A processing method for a solid structure for performing a processing procedure, the processing procedure comprising a following step of:
- performing a modification step, wherein the modification step comprises:
- using a laser source to provide a laser energy to a processing target area of the solid structure;
- and
- using a microwave or radio-frequency source to provide a microwave or radio-frequency energy to the solid structure, wherein the processing target area of the solid structure weaken atomic bond structures or change a crystallinity of the processing target area by the laser energy and the microwave or radio-frequency energy, which achieve a forward cycle effect on the processing target area, to become a modified layer.
Dependencies are inferred from the claim text.