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US 12,002,661 B2Granted
Susceptor having cooling device
AssigneeASM IP Holding B.V.
InventorsYukihiro Mori, Melvin Verbaas
Life of this patent
Estimating the term…
Abstract
A susceptor includes a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part.
Claims15
A susceptor comprising:
- a plate part;
- a first heater configured to heat a first portion of the plate part, wherein the first heater is disposed in the first portion;
- a second heater configured to heat a second portion of the plate part, the second portion being different from the first portion, wherein the second heater is disposed in the second portion;
- a heat insulating portion configured to thermally insulate the first portion and the second portion from each other on an upper surface side of the plate part, the heat insulating portion including a grooved portion provided in the plate part on the upper surface side, wherein the grooved portion is located between the first heater and the second heater;
- a cooling device configured to cool the plate part right below the grooved portion, at least a part of the cooling device extends below the grooved portion;
- a first closing part provided on the first portion and a part of the grooved portion to narrow a groove in the grooved portion without contacting the second portion;
- and
- a second closing part provided on the second portion and a part of the grooved portion to narrow the groove in the grooved portion without contacting the first portion and the first closing part.
5 more elements
Dependencies are inferred from the claim text.