Process cooling-water isolation

A method of operating a process cooling-water isolation system for a process tool, the method comprising:

• monitoring for a water leak within the process tool;
• based on a determination that a water leak has been detected:
• shutting down the process tool;
• sounding an alarm;
• and
• closing a double-acting isolation valve supplying cooling water to the process tool by operating a close input of the double-acting isolation valve using a close device coupled to the close input of the double-acting isolation valve;
• based on a determination that a water leak has not been detected:
• selecting from (i) opening the isolation valve by operating an open input of the double-acting isolation valve using an open device coupled to the open input of the double-acting isolation valve and (ii) continuing to leave the valve open if previously opened;
• and
• continuing to monitor for water leaks.

A machine-readable storage medium storing a set of instructions that, when executed by a machine, cause the machine to perform operations for operating a process cooling-water isolation system for a process tool, the operations comprising:

• monitoring for a water leak within the process tool;
• based on a determination that a water leak has been detected:
• shutting down the process tool;
• sounding an alarm;
• and
• closing a double-acting isolation valve supplying cooling water to the process tool by operating a close input of the double-acting isolation valve using a close device coupled to the close input of the double-acting isolation valve;
• based on a determination that a water leak has not been detected:
• selecting from (i) opening the isolation valve by operating an open input of the double-acting isolation valve using an open device coupled to the open input of the double-acting isolation valve and (ii) continuing to leave the valve open if previously opened;
• and
• continuing to monitor for water leaks.