Modular high-frequency source

A modular high-frequency emission source, comprising:

• a plurality of high-frequency emission modules, wherein each high-frequency emission module comprises:
• an oscillator module, wherein the oscillator module comprises:
• a voltage control circuit;
• and
• a voltage controlled oscillator, wherein an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator to generate an output high-frequency electromagnetic radiation;
• an amplification module, wherein the amplification module is coupled to the oscillator module, wherein the amplification module amplifies the output high-frequency electromagnetic radiation from the voltage controlled oscillator;
• and
• an applicator, wherein the applicator is coupled to the amplification module, wherein two or more but not all of the high-frequency emission modules share an oscillator module.

A processing tool, comprising:

• a processing chamber;
• and
• a modular high-frequency emission source, comprising:
• a plurality of high-frequency emission modules, wherein each high-frequency emission module comprises:
• an oscillator module, wherein each oscillator module comprises:
• a voltage control circuit;
• and
• a voltage controlled oscillator;
• an amplification module, wherein the amplification module is coupled to the oscillator module;
• and
• an applicator, wherein the applicator is coupled to the amplification module, and wherein the applicator is positioned opposing a chuck in the processing chamber on which one or more substrates are processed, wherein two or more but not all of the high-frequency emission modules share an oscillator module.