Systems and methods for compensating for RF power loss

A controller for compensation for loss of radio frequency (RF) power, comprising:

• a processor configured to:
• obtain a plurality of measurements of a plurality of parameters associated with a component of a plasma system;
• determine from the plurality of measurements of the plurality of parameters a resistance associated with the component of the plasma system;
• obtain a first value of one of the plurality of parameters associated with the component of the plasma system;
• determine a first amount of loss of RF power associated with the component of the plasma system from the resistance and the first value of the one of the plurality of parameters;
• adjust a set point of operation of an RF generator based on the first amount of loss of RF power, wherein the set point of operation of the RF generator is adjusted based on the first amount of loss of RF power to control the RF generator to operate at a second set point;
• obtain a second value of the one of the plurality of parameters associated with the component of the plasma system;
• determine a second amount of loss of RF power from the resistance and the second value of the one of the plurality of parameters;
• and
• adjust the set point of operation of the RF generator based on the second amount of loss of RF power, wherein the set point of operation is adjusted based on the second amount of loss of RF power to control the RF generator to operate at a third set point, wherein the set point of operation is adjusted based on the first and second amounts of loss of RF power to compensate for loss of RF power;
• and
• a memory device coupled to the processor for storing the plurality of measurements of the plurality of parameters.

A plasma system for compensation for loss of radio frequency (RF) power, comprising:

• a radio frequency (RF) generator configured to generate an RF signal;
• an impedance matching circuit coupled to the RF generator for receiving the RF signal;
• and
• a computer coupled to the RF generator, wherein the computer is configured to:
• obtain a plurality of measurements of a plurality of parameters associated with a component of the plasma system;
• determine from the plurality of measurements of the plurality of parameters a resistance associated with the component of the plasma system;
• obtain a first value of one of the plurality of parameters associated with the component of the plasma system;
• determine a first amount of loss of RF power associated with the component of the plasma system from the resistance and the first value of the one of the plurality of parameters;
• adjust a set point of operation of the RF generator based on the first amount of loss of RF power, wherein the set point of operation of the RF generator is adjusted based on the first amount of loss of RF power to control the RF generator to operate at a second set point;
• obtain a second value of the one of the plurality of parameters associated with the component of the plasma system;
• determine a second amount of loss of RF power from the resistance and the second value of the one of the plurality of parameters;
• and
• adjust the set point of operation of the RF generator based on the second amount of loss of RF power, wherein the set point of operation is adjusted based on the second amount of loss of RF power to control the RF generator to operate at a third set point,
• wherein the set point of operation is adjusted based on the first and second amounts of loss of RF power to compensate for loss of RF power.