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US 12,002,611 B2Granted
High power low frequency coils
AssigneeComet Technologies USA, Inc.
InventorsKirkwood Rough, Aaron Cuttino
Life of this patent
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Abstract
A coil having a coil body and a plurality of concentric cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire. Also, a coil for a plasma processing device, the coil having a coil body and a plurality of concentric cylindrical cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire and a diameter to length ratio of between about 2:1 and about 3:1.
Claims20
A multi-layer inductor coil, comprising:
- a coil form comprising:
- a coil form center, and
- a plurality of coil form extensions radially extending from the coil form center, each coil form extension elongated in an axial direction;
- and
- a continuous wire filament wound on the coil form extensions, the continuous wire filament thereby forming a plurality of radially spaced apart concentric winding layers;
- wherein each winding layer comprises a plurality of turns extending in the axial direction;
- and
- wherein a cross-section of the plurality of radially spaced apart concentric winding layers forms a triangle in the disposition of the continuous wire filament.
5 more elements
Dependencies are inferred from the claim text.