Multi-beam vertical probes with independent arms formed of a high conductivity metal for enhancing current carrying capacity and methods for making such probes

A two-dimensional probe array for testing a DUT, comprising:

• (a) at least one array structure having a plurality of openings;
• (b) a plurality of vertical probes with each inserted into an opening in the at least one array structure, wherein each vertical probe comprises:
• (i) a first end portion comprising a contact region;
• (ii) a second end portion, different from the first end portion;
• and
• (iii) a central portion extending longitudinally and connecting the first and second end portions, wherein the central portion comprises at least three compliant arms separated from one another by at least one gap wherein the arms bend under load and run longitudinally, wherein a cross-section taken perpendicular to a local longitudinal direction in the central portion encounters each of the at least three compliant arms,
• wherein the at least three compliant arms comprise at least first and second outer arms that bend elastically and at least one intermediate arm located at a position that is at least partially between the first and second outer arms, wherein each of the first and second outer arms comprise a first material having a first yield strength while the intermediate arm comprises a second material having a second yield strength which is lower than the first yield strength, and
• wherein the first material of first and second outer arms having the first yield strength comprises a material selected from a group consisting of:
• (1) nickel, (2) nickel-cobalt, (3) nickel-phosphor, (4) palladium, (5) beryllium-copper, (6) tungsten, (7) titanium, (8) nickel-tungsten, (9) palladium-rhenium, (10) an alloy of nickel, and (11) an alloy of palladium.